RF MEMS Based 60 GHz Variable Attenuator

Navjot K. Khaira, Tejinder Singh, R. Mansour
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引用次数: 8

Abstract

This paper presents a millimeter-wave variableattenuator realized using a lateral radio-frequency (RF) microelectromechanical systems (MEMS) capacitive type switch. The proposed variable attenuator comprises of two CPW based quadrature hybrid couplers paired with capacitive type thermally-actuated lateral MEMS switches. The voltage applied to the Chevron actuator regulates the precise mechanical movement of the contact plate and hence defines the range of attenuation. At the center frequency of 60 GHz, the attenuation monotonically varied from 4 dB to 20 dB with the applied voltage. Return loss better than 20 dB over a bandwidth of 4 GHz is achieved. The proposed fabrication process provides the ability to integrate the lateral actuators, movable plates, RF CPW lines, and the CPW hybrid coupler and other supporting structures on an SOI substrate.
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基于射频MEMS的60ghz可变衰减器
提出了一种利用横向射频微机电系统电容式开关实现的毫米波可变衰减器。所提出的可变衰减器由两个基于CPW的正交混合耦合器和电容型热致动横向MEMS开关配对组成。施加到雪佛龙致动器的电压调节接触板的精确机械运动,因此确定衰减范围。在中心频率为60 GHz时,衰减随外加电压的变化呈4 ~ 20 dB的单调变化。在4 GHz带宽下,回波损耗优于20 dB。提出的制造工艺提供了在SOI基板上集成横向致动器、可移动板、RF CPW线、CPW混合耦合器和其他支撑结构的能力。
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