A thresholding method for circuit pattern images containing low contrast signals

Y. Hara, H. Doi, K. Karasaki, Tadashi Iida, Norihiro Minatani, Minoru Nohara
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引用次数: 2

Abstract

This paper describes a method for thresholding gray-scale images to produce binary images in real time. It is specifically designed for thresholding images that contain both small, low-contrast defect patterns and relatively large, high-contrast circuit patterns without image deformation. This method analyzes peaks and troughs in the detected signal waveforms to threshold the low-contrast patterns ; it applies the constant threshold technique to the high-contrast circuit patterns. Experiments show that this method can properly threshold images containing both small defect patterns of approximately 20% contrast and circuit patterns of approximately 90% contrast.
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包含低对比度信号的电路图形图像的阈值化方法
本文介绍了一种灰度图像阈值化的方法,用于实时生成二值图像。它是专门为阈值图像设计的,这些图像既包含小的、低对比度的缺陷图案,也包含相对较大的、高对比度的电路图案,而不会产生图像变形。该方法通过分析检测信号波形中的波峰和波谷,对低对比度模式进行阈值处理;它将恒阈值技术应用于高对比度电路图。实验结果表明,该方法能较好地对对比度约为20%的小缺陷图案和对比度约为90%的电路图案进行阈值检测。
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