T. Hemke, A. Wollny, M. Gebhardt, R. Brinkmann, T. Mussenbrock
{"title":"Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure","authors":"T. Hemke, A. Wollny, M. Gebhardt, R. Brinkmann, T. Mussenbrock","doi":"10.1109/PLASMA.2010.5534160","DOIUrl":null,"url":null,"abstract":"Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2010-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 35th International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2010.5534160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.
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