Geometric design rules of four-terminal gauge for pressure sensors

Abstract

Both numerical analysis using the finite differential method and experimental measurements are performed for varius geometric designs of rectangular four-terminal pressure gauges to assess the short-circuiting effect of current contacts and sensor contacts on the sensitivity of the sensor. The agreement between the calculated and experimental results is quite good. Based on the results obtained, geometric design rules are suggested: the length:width ratio of the body should be 1:1 to 1:2 and the length:width ratio for the signal conducting arms should be around 1:1.