B.W. van Oudheusden, J.M. de Bruijn, P.J. Hoogeboom, D. Beaufort, J.H. Huijsing
{"title":"Integrated sensor for non-invasive monitoring of flow in pipes","authors":"B.W. van Oudheusden, J.M. de Bruijn, P.J. Hoogeboom, D. Beaufort, J.H. Huijsing","doi":"10.1016/0250-6874(89)87033-7","DOIUrl":null,"url":null,"abstract":"<div><p>A silicon chip fabricated with standard IC technology has been used to monitor air flow in a pipe in a non-invasive way through the pipe wall. Flow detection is based on the measurement of a temperature difference on the chip, which is heated with respect to the flow. The device is direction sensitive and has a zero output in the absence of flow. In the experiment the detection threshold for air flow is approximately 0.1 m/s.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"18 3","pages":"Pages 259-267"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87033-7","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870337","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A silicon chip fabricated with standard IC technology has been used to monitor air flow in a pipe in a non-invasive way through the pipe wall. Flow detection is based on the measurement of a temperature difference on the chip, which is heated with respect to the flow. The device is direction sensitive and has a zero output in the absence of flow. In the experiment the detection threshold for air flow is approximately 0.1 m/s.
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