{"title":"An interchangeable silicon pressure sensor with on-chip compensation circuitry","authors":"P. Kopystynski, E. Obermeier","doi":"10.1016/0250-6874(89)87031-3","DOIUrl":null,"url":null,"abstract":"<div><p>A new concept for the calibration and temperature compensation of a piezoresistive silicon pressure sensor is proposed, in which the piezoresistive Wheatstone bridge is combined on chip with a trimmable polysilicon resistor network. The design, fabrication and measured characteristic of a sensor based on this concept are presented.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"18 3","pages":"Pages 239-245"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87031-3","citationCount":"24","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870313","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 24
Abstract
A new concept for the calibration and temperature compensation of a piezoresistive silicon pressure sensor is proposed, in which the piezoresistive Wheatstone bridge is combined on chip with a trimmable polysilicon resistor network. The design, fabrication and measured characteristic of a sensor based on this concept are presented.
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