激光诱导周期结构中薄膜厚度对非晶硅薄膜的影响。

IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Frontiers of Optoelectronics Pub Date : 2023-06-20 DOI:10.1007/s12200-023-00071-6
Liye Xu, Jiao Geng, Liping Shi, Weicheng Cui, Min Qiu
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引用次数: 1

摘要

本文报道了用飞秒激光诱导氧化法在非晶硅薄膜上制备的自组织周期纳米结构。研究了硅薄膜厚度和衬底材料对结构周期性的影响。结果表明,当硅膜厚度为200 nm时,自组织纳米结构的周期接近激光波长,对衬底不敏感;相比之下,当硅薄膜为50 nm时,纳米结构的周期远短于激光波长,并且依赖于衬底。此外,我们证明,对于厚硅薄膜,准圆柱形波主导周期性纳米结构的形成,而对于薄硅薄膜,形成源于平板波导模式。基于时域有限差分方法的数值模拟支持了实验发现。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Impact of film thickness in laser-induced periodic structures on amorphous Si films.

We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the substrates. In contrast, when the silicon film is 50 nm, the period of nanostructures is much shorter than the laser wavelength, and is dependent on the substrates. Furthermore, we demonstrate that, for the thick silicon films, quasi-cylindrical waves dominate the formation of periodic nanostructures, while for the thin silicon films, the formation originates from slab waveguide modes. Finite-difference time-domain method-based numerical simulations support the experimental discoveries.

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来源期刊
Frontiers of Optoelectronics
Frontiers of Optoelectronics ENGINEERING, ELECTRICAL & ELECTRONIC-
CiteScore
7.80
自引率
0.00%
发文量
583
期刊介绍: Frontiers of Optoelectronics seeks to provide a multidisciplinary forum for a broad mix of peer-reviewed academic papers in order to promote rapid communication and exchange between researchers in China and abroad. It introduces and reflects significant achievements being made in the field of photonics or optoelectronics. The topics include, but are not limited to, semiconductor optoelectronics, nano-photonics, information photonics, energy photonics, ultrafast photonics, biomedical photonics, nonlinear photonics, fiber optics, laser and terahertz technology and intelligent photonics. The journal publishes reviews, research articles, letters, comments, special issues and so on. Frontiers of Optoelectronics especially encourages papers from new emerging and multidisciplinary areas, papers reflecting the international trends of research and development, and on special topics reporting progress made in the field of optoelectronics. All published papers will reflect the original thoughts of researchers and practitioners on basic theories, design and new technology in optoelectronics. Frontiers of Optoelectronics is strictly peer-reviewed and only accepts original submissions in English. It is a fully OA journal and the APCs are covered by Higher Education Press and Huazhong University of Science and Technology. ● Presents the latest developments in optoelectronics and optics ● Emphasizes the latest developments of new optoelectronic materials, devices, systems and applications ● Covers industrial photonics, information photonics, biomedical photonics, energy photonics, laser and terahertz technology, and more
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