半导体制程技术检测的防伪方法

Matthias Ludwig, A. Bette, Bernhard Lippmann, G. Sigl
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引用次数: 1

摘要

随着全球半导体供应链的分布和微电子产品的稀缺,假冒设备的势头正在增强。从可信的供应商那里采购产品是理论上的补救措施,但实践表明现实。伪造电子产品正以很高的速度进入供应链,并对安全性、可靠性和安全性构成威胁。学术界和工业界已经制定了各种制作前或制作后的措施来有效地解决这一问题。然而,该领域的几个未充分涵盖的方面需要改进。首先,本文引入了一种评级方案,使防伪方法之间能够进行有效的比较。使用该方案对最近发表的方法进行了比较。其次,建立了一种新的、通用的、普遍适用的证明者-验证者认证框架,用于后期防伪方法。第三,本工作实现了一种新的防伪方法。该方法通过引入技术个体特征,将半导体前端制造工艺的技术内在特征作为技术显著特征。通过模式识别和统计方法提取配置文件参数,通过距离度量将其与预期技术进行比较,从而可以断言设备的真实性。最后,通过实际样品验证了该方法的通用性。总体而言,对7个样品进行真实性检查,报告的准确性为100%。
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Counterfeit Detection by Semiconductor Process Technology Inspection
With world-wide distributed semiconductor supply chains and a scarcity of microelectronic products, counterfeit devices are gaining momentum. Sourcing products from trusted providers are the theoretical remedy, yet practice shows the reality. Forged electronics are entering the supply chain at a high rate and pose a threat to safety, reliability, and security. Academia and industry have established various pre- or post-production measures to effectively address this issue partially. Yet, several inadequately covered aspects of the field require improvements. First, this work introduces a rating scheme to enable the effective comparison between anti-counterfeiting methods. Recently published methods are compared using this scheme. Second, a novel, generic, generally applicable prover-verifier attestation framework for post-production anti-counterfeiting methods is established. Third, the work implements a new anti-counterfeit method. By introducing technological individual features, the method incorporates technology intrinsic features of the front-end semiconductor manufacturing process as technology distinctive characteristic. Profile parameters are extracted through pattern recognition and statistical methods which are compared to the expected technologies through distance metrics, allowing an assertion of device authenticity. Finally, the versatility of the method is experimentally validated through real samples. Overall, an accuracy of 100% is reported for seven samples which are checked for authenticity.
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