4位“分布式驱动”MEMS移相器的设计

Jianzhong Lou, Zhuo Xu, Miao Lu, Xiaodong Hu, Zhengping Zhao, Yang Ruixia
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引用次数: 0

摘要

本文首次提出了“分布式驱动”MEMS移相器的思想。最小相移位作为基本单元。多比特移相器由数十个串联单元组成。细胞的相移随序列变化而增大。将4位移相器的反射平面从0-3减小到0-1,进一步降低了回波损耗和插入损耗。本文利用HFSS对22.5°相移电池进行了全波电磁仿真。采用ADS仿真了15个单元级联的4位DMTL移相器。在“分布式驱动”下,最大回波损耗为-11 dB,在直流至32 GHz的常规范围内,最大回波损耗为- 7.5dB。对于“分布式驱动”,从直流到32 GHz的插入损耗优于-3 dB。在16ghz时,插入损耗为-3.5 dB。
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A Design of 4-bit "Distributed drive" MEMS Phase Shifters
An idea of "distributed drive" MEMS phase shifter is first proposed in this dissertation. The minimum phase shift bit act as elementary cell. The multi-bits phase shifter is consist of dozens of series cell. The phase shift is increased by sequence change phase shift of cell. It decrease the reflection plane from 0-3 to 0-1 for 4 bit phase shifter, further decrease the return loss and insertion loss. In this paper, the full wave electromagnetic simulation of the 22.5deg phase shift cell is done by HFSS. A 4-bit DMTL phase shifter that cascaded by 15 cell is simulated by ADS. The maximal return loss is -11 dB for "distributed drive", and - 7.5dB for conventionality from DC to 32 GHz. The insertion loss is better than -3 dB from DC to 32 GHz for "distributed drive". The insertion loss is -3.5 dB at 16 GHz for conventionality.
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