Fabrication and Simulation of Blazed Gratings with Inherent Antireflection Structured Surfaces

Subwavelength structured surfaces can be used as very efficient antireflection (AR) coatings, narrowband filters or polarizing elements [1]. In industry, AR coatings and filters are typically produced by using thin-film techniques. Sub wavelength structures can avoid many of the problems encountered in thin-film approaches, and be replicated at low cost. Subwavelength structures also have the potential to be combined with micro-optical elements such as lenses, gratings or kinoforms. However, previous studies have either been focused on the analysis of pure subwavelength gratings [2] or micro-optical elements coated with thin films [3].