物理气相沉积法大规模合成均匀ws2薄膜

A. Altuntepe, S. Erkan, Güldöne Karadeni̇z
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摘要

与石墨烯不同,tmd是半导体,当从体块转变为薄膜时具有直接带隙。由于tmd具有很强的光吸收和光致发光效应,这一特性使其成为光电和光伏应用的理想材料。WS2是一种流行的TMD,具有摩擦系数低、热稳定性高、导电性好等独特性能,间接和直接行为的带隙能量分别约为1.2 eV和2.2 eV。本文还讨论了各种合成WS2的方法,包括化学气相沉积(CVD)、物理气相沉积(PVD)、水热合成和溶剂热合成。PVD是一种生产大面积高质量薄膜和涂层的可扩展方法,但该方法难以控制硫或硒源,因此需要优化生长参数以实现大规模和高质量的WS2薄膜合成。该研究报告了利用PVD和优化的衬底温度在玻璃衬底上成功生长大规模均匀的WS2薄膜。该研究结果为WS2薄膜生长技术的进步和基于WS2的半导体技术的发展,如晶体管、二极管、光电探测器和太阳能电池的发展提供了有价值的信息。
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LARGE-SCALE SYNTHESIS OF HOMOGENEOUS WS2 FILMS BY PHYSICAL VAPOR DEPOSITION
TMDs are semiconductors, unlike graphene, and have a direct bandgap when converted from bulk to thin film. This property makes TMDs an ideal material for optoelectronic and photovoltaic applications due to their strong optical absorption and photoluminescence effect. The WS2, a popular TMD, has unique properties such as low friction coefficient, high thermal stability, and good electrical conductivity, and a bandgap energy of approximately 1.2 eV and 2.2 eV for indirect and direct behaviors. The article also discusses various methods for synthesizing WS2, including chemical vapor deposition (CVD), physical vapor deposition (PVD), hydrothermal synthesis, and solvothermal synthesis. PVD is a scalable method for producing large-area films and coatings with high quality, but the difficulty of controlling the sulfur or selenium sources in this method leads to the need for optimizing growth parameters for large-scale and high-quality WS2 film synthesis. The study reports the successful growth of large-scale and homogeneous WS2 films on a glass substrate using PVD and optimized substrate temperature. The results of this study provide valuable information for the advancement of WS2 film growth techniques and the development of WS2-based semiconductor technologies, such as transistors, diodes, photodetectors, and solar cells.
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