使用全内反射现象的太赫兹范围的辐射滤光器

A. S. Syrneva, V. V. Chesnokov, Dimetriy V. Checnokov
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引用次数: 0

摘要

正在研制的采用抑制全内反射的滤光片是一种包含两个硅矩形棱镜的微机械装置。在棱镜的斜边之间有一个平坦的硅平面。硅平面是一个法布里-珀罗谐振器,板和棱镜边缘之间的间隙h1是它的反射镜。当h1= 50µm时,滤光片的理论分辨率为R≈1,5·103;当h1= 100µm时,滤光片的理论分辨率为R≈3·105,硅平面厚度为h = 65µm;波长λ = 100µm;自由光谱区Δλ/λ≈0,3…0,4,透射光谱特性最大值为0,6(提供输入和输出硅棱镜腿绽放)。
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Radiation filters for the terahertz range using total internal reflection phenomenon
The optical filter under development employing frustrated total internal reflection is a micro-mechanical device containing two silicon rectangular prisms. There is a flat silicon plane among hypotenuse edges of the prisms. The silicon plane is a Fabry-Perot resonator, with clearances h1 among the plate and prism edges being its mirrors. Theoretical resolution of the optical filter would be R ≈ 1,5·103 if h1= 50 µm and R ≈ 3·105 if h1 = 100 µm with the thickness of the silicon plane being h = 65 µm; wavelength λ = 100 µm; free spectral region Δλ/λ ≈ 0,3…0,4, transmission in the maximum of spectral characteristics 0,6 (provided input and output silicon prism legs bloom).
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