RF-SOC集成中衬底隔离技术的实验分析

2009 IEEE International SOC Conference (SOCC) Pub Date : 2009-09-01 DOI:10.1109/SOCCON.2009.5398059

Marc Molina, X. Aragonès, J. González

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引用次数: 5

摘要

给出了N型环和p型环以及0.35 μm和0.18 μm工艺的三井结构的隔离实验测量结果。将所得结果与以往的隔离实验工作进行了比较，讨论了影响隔离技术效果的条件及其与频率的依赖关系。

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Experimental analysis of substrate isolation techniques for RF-SOC integration

Experimental measurements of the isolation provided by N and P-type rings, and triple-well structures implemented in 0.35 μm and 0.18 μm technologies are presented. The results obtained are compared to previous experimental works on isolation, and the conditions that affect the efficacy of the isolation techniques are discussed, as well as their dependence with frequency.

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2009 IEEE International SOC Conference (SOCC)

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