大规模微机电驱动二维光学相控阵

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI:10.1109/MEMSYS.2018.8346471

Youmin Wang, Guangya Zhou, Kyoungsik Yu, Ming C. Wu

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引用次数: 2

摘要

我们报道了一种新的二维(2-D)光学相控阵，其中有25,600个可寻址移相器，由具有平面内运动的衍射光栅制成。相移与波长无关，只与光栅的位移有关。大光学孔径3.2×3.1mm2在1550nm波长下产生窄光束(0.028°×0.029°)，可在4.4°×4.6°的视场范围内操纵，最大响应时间为4.2μs。

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Large-scale MEMS-actuated 2-D optical phased arrays

We report on a novel two-dimensional (2-D) optical phased arrays with 25,600 addressable phase shifters made of diffraction gratings with in-plane movement. The phase shift is independent of wavelength, and only depends on the displacement of the grating. The large optical aperture 3.2×3.1mm² produces a narrow beam (0.028°×0.029°) steerable over a field-of-view of 4.4°×4.6° at 1550nm wavelength, with a maximum response time of 4.2μs.

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2018 IEEE Micro Electro Mechanical Systems (MEMS)

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