通过加速中性原子束(ANAB)处理提高氟化钙光学表面激光损伤阈值性能

S. Kirkpatrick, M. Walsh, R. Svrluga, M. Thomas
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引用次数: 2

摘要

光学没有跟上激光的发展步伐。激光工业正在迅速提高其功率能力和减少波长,这暴露了光学器件作为这些先进系统寿命失效的薄弱环节。光学器件表面的纳米级表面缺陷(划痕、凹坑、凹凸和残余颗粒)是影响其高端性能的重要限制因素。氟化钙、尖晶石、氟化镁、硫化锌、LBO等材料的埃级平滑对传统抛光技术提出了独特的挑战。Exogenesis公司使用其专有的加速中性原子束(ANAB)技术,能够去除纳米级表面损伤和颗粒污染,使许多材料表面粗糙度通常在1埃左右。这种通过ANAB处理的表面缺陷缓解可以提高高强度光学材料的性能。本文介绍了ANAB技术,总结了氟化钙激光窗的平滑效果。它进一步将激光损伤阈值的改善与ANAB表面处理产生的平滑联系起来。所有ANAB处理均在Exogenesis Corporation使用nAccel100TM加速粒子束处理工具进行。论文的所有表面测量数据都是通过在Park型号XE70 AFM上进行AFM分析产生的,所有激光损伤测试都是在Spica Technologies公司进行的。Exogenesis公司的ANAB加工技术是一种新的、独特的表面改性技术,已被证明在纠正纳米级表面缺陷方面非常有效。ANAB是一种非接触真空过程,由一束加速的、平均能量为几十电子伏特的电中性气体原子组成。ANAB工艺不应用与传统抛光技术相关的机械力。ANAB在低能量物理溅射条件下有效去除表面污染物、纳米级划痕、凹凸、颗粒和其他凹凸。ANAB可用于去除精确控制的均匀材料厚度,而不增加表面粗糙度,无论去除的材料总量如何。ANAB工艺不涉及使用浆料或其他研磨抛光化合物,因此不需要任何后处理清洁。ANAB可以作为一种原位表面制备方法集成到光学器件的不间断制造的其他工艺步骤中。
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Improved laser damage threshold performance of calcium fluoride optical surfaces via Accelerated Neutral Atom Beam (ANAB) processing
Optics are not keeping up with the pace of laser advancements. The laser industry is rapidly increasing its power capabilities and reducing wavelengths which have exposed the optics as a weak link in lifetime failures for these advanced systems. Nanometer sized surface defects (scratches, pits, bumps and residual particles) on the surface of optics are a significant limiting factor to high end performance. Angstrom level smoothing of materials such as calcium fluoride, spinel, magnesium fluoride, zinc sulfide, LBO and others presents a unique challenge for traditional polishing techniques. Exogenesis Corporation, using its new and proprietary Accelerated Neutral Atom Beam (ANAB) technology, is able to remove nano-scale surface damage and particle contamination leaving many material surfaces with roughness typically around one Angstrom. This surface defect mitigation via ANAB processing can be shown to increase performance properties of high intensity optical materials. This paper describes the ANAB technology and summarizes smoothing results for calcium fluoride laser windows. It further correlates laser damage threshold improvements with the smoothing produced by ANAB surface treatment. All ANAB processing was performed at Exogenesis Corporation using an nAccel100TM Accelerated Particle Beam processing tool. All surface measurement data for the paper was produced via AFM analysis on a Park Model XE70 AFM, and all laser damage testing was performed at Spica Technologies, Inc. Exogenesis Corporation’s ANAB processing technology is a new and unique surface modification technique that has demonstrated to be highly effective at correcting nano-scale surface defects. ANAB is a non-contact vacuum process comprised of an intense beam of accelerated, electrically neutral gas atoms with average energies of a few tens of electron volts. The ANAB process does not apply mechanical forces associated with traditional polishing techniques. ANAB efficiently removes surface contaminants, nano-scale scratches, bumps, particles and other asperities under low energy physical sputtering conditions. ANAB may be used to remove a precisely controlled, uniform thickness of material without any increase of surface roughness, regardless of the total amount of material removed. The ANAB process does not involve the use of slurries or other abrasive polishing compounds and therefore does not require any post process cleaning. ANAB can be integrated as an in-situ surface preparation method for other process steps in the uninterrupted fabrication of optical devices.
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