极ESD敏感器件的导线键合尖端研究

R. Money, C. Coureau, W. Boone, A. Wallash
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引用次数: 0

摘要

超声波粘接工具广泛应用于许多行业。本研究将研究超声波线键合的机制和静电放电去除的影响,使用一种常见的陶瓷材料,将其铺成3个不同的电阻组,并记录其行为。我们的目的是检查键合工具控制电压的能力,并表征它们各自的耗散率,以确定最佳工艺窗口。实验将显示今天使用的典型工具作为机械粘接工具的积极和消极影响。分析了该尖端在模拟远离浮动磁流变磁头的耗散电压时的有效性。我们将检查它们从器件放电电压和降低ESD电流的能力。
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Wire bonding tip study for extremely ESD sensitive devices
Ultrasonic bonding tools are used extensively in many industries. This study will examine the mechanism of Ultrasonic wire bonding & the effects of ESD charge removal using a common ceramic material spread into 3 different resistances groups and recording the behavior. Our purpose is to examine the bonding tool's ability to control - voltage and characterize their respective dissipation rates for the purpose of determining an optimum process window. Experimentation will show the positive & negative effects of typical tools in use today as mechanical bonding tools. An analysis is shown of the effectiveness of the tip in simulating the dissipating voltage away from a floating GMR head. We will examine their ability to discharge voltage from devices and reduce ESD currents.
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Improved wafer-level VFTLP system and investigation of device turn-on effects Wire bonding tip study for extremely ESD sensitive devices Characterizing automated handling equipment using discharge current measurements Study of “hot spots” arising from non-homogeneity in the micro-structures of dissipative materials VF-TLP systems using TDT and TDRT for kelvin wafer measurements and package level testing
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