P - zno:(P,N)/ N - zno:Al均结紫外发光二极管的制备与表征

Amiruddin Rafiudeen, T. Reddy, Shaheer Cheemadan, M.C. Santhosh Kumar
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引用次数: 0

摘要

ZnO具有成本低、带隙宽(3.36 eV)、激子结合能大(60meV)等特点。由于带隙位于紫外区,ZnO被认为是制造紫外发光二极管(UV- led)的新材料。然而,ZnO作为本禀n型半导体,其关键挑战在于实现稳定和可再生的p型ZnO。本研究通过在ZnO薄膜中同时掺杂P和N等双受体族v元素来获得P型特性。采用可编程喷雾热解技术在697K温度下在玻璃基板上进行沉积。P和N的最佳掺杂浓度为0.75 at%,空穴浓度为4.48 x 10^18 cm-3,电阻率值为9.6 Ω.cm。发现沉积的p-ZnO在六个多月的时间内是稳定的。通过掺铝(3 at%)制备出高导电性的n型ZnO薄膜,其电子浓度为1.52 x 10^19 cm-3,电阻率为3.51 x 10-2 Ω.cm。研究了n-ZnO和p-ZnO薄膜的结构、形貌、光学和电学性能。采用最佳P - zno:(P,N)和N - zno:Al层制备了高效的P - N同质结。电流-电压(I-V)特性显示了低导通电压下pn结的典型整流特性。电致发光(EL)研究表明,制备的p-n同质结二极管在378 nm左右的紫外区表现出较强的发射特性。
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Fabrication and characterization of p-ZnO:(P,N)/n-ZnO:Al homojunction ultra-violet (UV) light emitting diodes (Presentation Recording)
ZnO possess distinctive characteristics such as low cost, wide band gap (3.36 eV) and large exciton binding energy (60meV). As the band gap lies in ultra violet (UV) region, ZnO is considered as a novel material for the fabrication of ultra violet light emitting diodes (UV-LEDs). However, ZnO being intrinsic n-type semiconductor the key challenge lies in realization of stable and reproducible p-type ZnO. In the present research dual acceptor group-V elements such as P and N are simultaneously doped in ZnO films to obtain the p-type characteristics. The deposition is made by programmable spray pyrolysis technique upon glass substrates at 697K. The optimum doping concentration of P and N were found to be 0.75 at% which exhibits hole concentration of 4.48 x 10^18 cm-3 and resistivity value of 9.6 Ω.cm. The deposited p-ZnO were found to be stable for a period over six months. Highly conducting n-type ZnO films is made by doping aluminum (3 at%) which exhibits higher electron concentration of 1.52 x 10^19 cm-3 with lower electrical resistivity of 3.51 x 10-2 Ω.cm. The structural, morphological, optical and electrical properties of the deposited n-ZnO and p-ZnO thin films are investigated. An efficient p-n homojunction has been fabricated using the optimum p-ZnO:(P,N) and n-ZnO:Al layers. The current–voltage (I–V) characteristics show typical rectifying characteristics of p-n junction with a low turn on voltage. Electroluminescence (EL) studies reveals the fabricated p-n homojunction diodes exhibits strong emission features in ultra-violet (UV) region around 378 nm.
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