{"title":"基于mems的三轴加速度计智能传感器的设计","authors":"J. Tieman, J. Schmalzel, R. Krchnavek","doi":"10.1109/SFICON.2002.1159799","DOIUrl":null,"url":null,"abstract":"Accelerometers are used for a number of physical measurements in aerospace, defense, automotive, household appliances, instrumentation, transport, material handling, etc. Recently micro-electromechanical system (MEMS) technologies have been used to manufacture accelerometers. MEMS sensors include transducer elements and the necessary signal conditioning electronics integrated together on a single integrated circuit (IC). This paper describes the design of a low-cost, compact MEMS-based smart sensor system for 3-axis acceleration measurement using only commercial off the shelf (COTS) components.","PeriodicalId":294424,"journal":{"name":"2nd ISA/IEEE Sensors for Industry Conference,","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Design of a MEMS-based, 3-axis accelerometer smart sensor\",\"authors\":\"J. Tieman, J. Schmalzel, R. Krchnavek\",\"doi\":\"10.1109/SFICON.2002.1159799\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Accelerometers are used for a number of physical measurements in aerospace, defense, automotive, household appliances, instrumentation, transport, material handling, etc. Recently micro-electromechanical system (MEMS) technologies have been used to manufacture accelerometers. MEMS sensors include transducer elements and the necessary signal conditioning electronics integrated together on a single integrated circuit (IC). This paper describes the design of a low-cost, compact MEMS-based smart sensor system for 3-axis acceleration measurement using only commercial off the shelf (COTS) components.\",\"PeriodicalId\":294424,\"journal\":{\"name\":\"2nd ISA/IEEE Sensors for Industry Conference,\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2nd ISA/IEEE Sensors for Industry Conference,\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SFICON.2002.1159799\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2nd ISA/IEEE Sensors for Industry Conference,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SFICON.2002.1159799","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design of a MEMS-based, 3-axis accelerometer smart sensor
Accelerometers are used for a number of physical measurements in aerospace, defense, automotive, household appliances, instrumentation, transport, material handling, etc. Recently micro-electromechanical system (MEMS) technologies have been used to manufacture accelerometers. MEMS sensors include transducer elements and the necessary signal conditioning electronics integrated together on a single integrated circuit (IC). This paper describes the design of a low-cost, compact MEMS-based smart sensor system for 3-axis acceleration measurement using only commercial off the shelf (COTS) components.
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