恒压试验对电迁移研究的评价

Z. Zhang, B. McGowan, Z. Feldmaier, J. Lloyd, T. McMullen, E. Wilcox, S. Schultz
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引用次数: 3

摘要

恒压电迁移测试(CV)被认为是电迁移(EM)鉴定中传统恒流测试(CC)的补充方法。结果表明,铜导体中的电磁寿命随电路的细节而变化。在失效分布和可能的失效模式上也存在差异。此外,还采用恒电压试验来检测寿命对位置的依赖性和冗余度。实验显示了两种测试类型的不可忽略的差异,并且得出结论,需要进一步的失效分析来确认和/或理解观察结果中的差异。
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Evaluation of constant voltage testing for electromigration study
Constant voltage electromigration testing (CV) was evaluated to be a complementary method to traditional constant current (CC) testing during electromigration (EM) qualification. It is demonstrated that the EM lifetime in copper conductors could vary depending on the details of the circuit. There is also a difference in failure distribution and possibly in failure modes as well. Furthermore, the constant voltage test was used to probe the lifetime dependency on location and for investigating redundancy. The experiments showed non negligible differences in both types of test and it is concluded that further failure analysis required for confirming and/or understanding the differences in the observations.
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