Z. Zhang, B. McGowan, Z. Feldmaier, J. Lloyd, T. McMullen, E. Wilcox, S. Schultz
{"title":"恒压试验对电迁移研究的评价","authors":"Z. Zhang, B. McGowan, Z. Feldmaier, J. Lloyd, T. McMullen, E. Wilcox, S. Schultz","doi":"10.1109/IRPS.2013.6532078","DOIUrl":null,"url":null,"abstract":"Constant voltage electromigration testing (CV) was evaluated to be a complementary method to traditional constant current (CC) testing during electromigration (EM) qualification. It is demonstrated that the EM lifetime in copper conductors could vary depending on the details of the circuit. There is also a difference in failure distribution and possibly in failure modes as well. Furthermore, the constant voltage test was used to probe the lifetime dependency on location and for investigating redundancy. The experiments showed non negligible differences in both types of test and it is concluded that further failure analysis required for confirming and/or understanding the differences in the observations.","PeriodicalId":138206,"journal":{"name":"2013 IEEE International Reliability Physics Symposium (IRPS)","volume":"2011 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Evaluation of constant voltage testing for electromigration study\",\"authors\":\"Z. Zhang, B. McGowan, Z. Feldmaier, J. Lloyd, T. McMullen, E. Wilcox, S. Schultz\",\"doi\":\"10.1109/IRPS.2013.6532078\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Constant voltage electromigration testing (CV) was evaluated to be a complementary method to traditional constant current (CC) testing during electromigration (EM) qualification. It is demonstrated that the EM lifetime in copper conductors could vary depending on the details of the circuit. There is also a difference in failure distribution and possibly in failure modes as well. Furthermore, the constant voltage test was used to probe the lifetime dependency on location and for investigating redundancy. The experiments showed non negligible differences in both types of test and it is concluded that further failure analysis required for confirming and/or understanding the differences in the observations.\",\"PeriodicalId\":138206,\"journal\":{\"name\":\"2013 IEEE International Reliability Physics Symposium (IRPS)\",\"volume\":\"2011 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-04-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE International Reliability Physics Symposium (IRPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.2013.6532078\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Reliability Physics Symposium (IRPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.2013.6532078","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Evaluation of constant voltage testing for electromigration study
Constant voltage electromigration testing (CV) was evaluated to be a complementary method to traditional constant current (CC) testing during electromigration (EM) qualification. It is demonstrated that the EM lifetime in copper conductors could vary depending on the details of the circuit. There is also a difference in failure distribution and possibly in failure modes as well. Furthermore, the constant voltage test was used to probe the lifetime dependency on location and for investigating redundancy. The experiments showed non negligible differences in both types of test and it is concluded that further failure analysis required for confirming and/or understanding the differences in the observations.