K. Sawada, G. van der Plas, S. Mori, C. Vladimir, A. Mercha, V. Diederik, Y. Fukuzaki, H. Ammo
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In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit
CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 213 pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extract MOSFET's gate capacitances of several tens of fF.
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