{"title":"基于GO/SiO2/128°YX-LiNbO3结构的瑞利波传感器有限元建模","authors":"Yan Wang, Xiao-qing Liu, Shu-lin Shang, Xun Xu","doi":"10.1109/SPAWDA48812.2019.9019330","DOIUrl":null,"url":null,"abstract":"3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO<inf>2</inf>/IDT(inter-digital transducer)/128° YX-LiNbO<inf>3</inf> structures, including the phase velocity v<inf>p</inf>, electromechanical coupling coefficient k<sup>2</sup>, and gas sensing properties. The results show that the GO layersimprove the characteristics of the Rayleigh wave devices, that is, v<inf>p</inf> andk<sup>2</sup> are increased by the introduction of GO films. And thek<sup>2</sup>of 9.32% associated with phase velocity of 4517m/s have obtained as h<inf>s</inf>/λ=0.01 and h<inf>GO</inf>=0.5μm, which are higher than that of GO free Rayleigh wave device. Meanwhile, the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers. Therefore, GO is an ideal material for constructing SAW sensors for widespread applications.","PeriodicalId":208819,"journal":{"name":"2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)","volume":"213 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fem Modeling Rayleigh Wave Sensors Based on GO/SiO2/128° YX-LiNbO3 Structures\",\"authors\":\"Yan Wang, Xiao-qing Liu, Shu-lin Shang, Xun Xu\",\"doi\":\"10.1109/SPAWDA48812.2019.9019330\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO<inf>2</inf>/IDT(inter-digital transducer)/128° YX-LiNbO<inf>3</inf> structures, including the phase velocity v<inf>p</inf>, electromechanical coupling coefficient k<sup>2</sup>, and gas sensing properties. The results show that the GO layersimprove the characteristics of the Rayleigh wave devices, that is, v<inf>p</inf> andk<sup>2</sup> are increased by the introduction of GO films. And thek<sup>2</sup>of 9.32% associated with phase velocity of 4517m/s have obtained as h<inf>s</inf>/λ=0.01 and h<inf>GO</inf>=0.5μm, which are higher than that of GO free Rayleigh wave device. Meanwhile, the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers. Therefore, GO is an ideal material for constructing SAW sensors for widespread applications.\",\"PeriodicalId\":208819,\"journal\":{\"name\":\"2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)\",\"volume\":\"213 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA48812.2019.9019330\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA48812.2019.9019330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fem Modeling Rayleigh Wave Sensors Based on GO/SiO2/128° YX-LiNbO3 Structures
3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO2/IDT(inter-digital transducer)/128° YX-LiNbO3 structures, including the phase velocity vp, electromechanical coupling coefficient k2, and gas sensing properties. The results show that the GO layersimprove the characteristics of the Rayleigh wave devices, that is, vp andk2 are increased by the introduction of GO films. And thek2of 9.32% associated with phase velocity of 4517m/s have obtained as hs/λ=0.01 and hGO=0.5μm, which are higher than that of GO free Rayleigh wave device. Meanwhile, the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers. Therefore, GO is an ideal material for constructing SAW sensors for widespread applications.
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