cz生长硅中载流子寿命不稳定性的研究

J. Schmidt, A. Aberle, R. Hezel
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引用次数: 212

摘要

在文献中,众所周知,掺硼的cz生长硅的低注入散体载体寿命不是一个恒定的材料性质,而是取决于先前的热处理和光暴露,在对应于高和低寿命值的两种状态之间变化。上层状态是通过低温退火获得的,而照明使寿命向下层状态的值降低。为了提高对这一现象的理解,我们对不同制造商获得的太阳能级和电子级掺杂硼、镓和磷的Cz晶圆进行了全面的载流子寿命测量。基于实验结果,提出了一个新的模型,将电阻率约为1 /spl ω /cm的掺硼Cz硅的低稳定寿命归因于硼氧对。从这个模型中,我们得到了简单的配方,这可能会提高商用Cz硅太阳能电池的效率。
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Investigation of carrier lifetime instabilities in Cz-grown silicon
In the literature it is well known that the low-injection bulk carrier lifetime of boron-doped Cz-grown silicon is not a constant material property but, depending on previous thermal treatments and light exposure, varies between two states corresponding to a high and a low lifetime value. The upper state is obtained by means of low-temperature annealing, while illumination degrades the lifetime towards the value of the lower state. In order to improve the understanding of this phenomenon, we performed comprehensive carrier lifetime measurements on solar- and electronic-grade boron, gallium, and phosphorus doped Cz wafers obtained from different manufacturers. Based on the experimental results, a new model is introduced which attributes the disappointingly low stable lifetimes of illuminated boron-doped Cz silicon with resistivity around 1 /spl Omega/cm to boron-oxygen pairs. From this model, simple recipes are derived which might lead to an improvement of the efficiency of commercial Cz silicon solar cells.
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