高灵敏度多芯MI元件的研制

N. Hamada, A. Shimode, C. Cai, M. Yamamoto
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摘要

MI传感器是Mori等人在1993年[1]发现的基于磁阻抗(Magneto Impedance, MI)效应的磁传感器。爱知微智基于上述磁敏效应开发了一种小型高灵敏度磁敏传感器(AMI 306),主要用于手机和智能手机的电磁罗盘,并已实现商业化[2]。根据理论分析,预计MI传感器的噪声密度将达到fT/√Hz水平[3],其性能甚至可以与SQUID媲美。采用电镀工艺制造带拾取线圈的MI元件(AMI306)用于电磁罗盘。虽然显示了微特斯拉量级的磁分辨率[4],但对灵敏度和噪声水平的要求更高。
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Development of high sensitivity multi core MI element
MI sensor is a magnetic sensor based on the Magneto Impedance (MI) effect discovered by Mori et al. in 1993[1]. A small and highly sensitive magnetic sensor (AMI 306) based on above MI effect and used as an electromagnetic compass mainly in mobile phones and smart phones has been developed and commercialized by AICHI MICRO INTELLIGENT[2]. According to theoretical analysis, the MI sensor is foreseen to show the fT/√Hz level of noise density[3], and its performance would even be equal to SQUID. MI element (AMI306) with pickup coil fabricated by a plating process is used in electromagnetic compasses. Although it shows magnetic resolution in the micro Tesla order[4], higher performance in sensitivity and noise level is required.
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