{"title":"聚焦离子束(FIB)用于芯片电路编辑和故障隔离","authors":"Steven B. Herschbein","doi":"10.31399/asm.cp.istfa2021tph1","DOIUrl":null,"url":null,"abstract":"\n Presentation slides from the ISTFA 2021 tutorial, “[Focused Ion Beam for Chip Circuit Edit and Fault Isolation].”","PeriodicalId":390794,"journal":{"name":"ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis","volume":"74 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Focused Ion Beam (FIB) for Chip Circuit Edit and Fault Isolation\",\"authors\":\"Steven B. Herschbein\",\"doi\":\"10.31399/asm.cp.istfa2021tph1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Presentation slides from the ISTFA 2021 tutorial, “[Focused Ion Beam for Chip Circuit Edit and Fault Isolation].”\",\"PeriodicalId\":390794,\"journal\":{\"name\":\"ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis\",\"volume\":\"74 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.cp.istfa2021tph1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2021tph1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
