{"title":"交错栅电极场效应晶体管(IGEFET)实现的环境敏感污染物化学选择性微传感器","authors":"E. Kolesar, J. M. Wiseman","doi":"10.1109/NAECON.1991.165723","DOIUrl":null,"url":null,"abstract":"An IGEFET has been coupled with a chemically active, electron-beam evaporated copper phthalocyanine (CuPc) thin film to realize a gas-sensitive microsensor. The sensor can selectively detect parts-per-billion concentration levels of nitrogen dioxide (NO/sub 2/) and diisopropyl methylphosphonate (DIMP). The sensor is excited with a voltage pulse, and the time- and frequency-domain responses are measured. The envelopes associated with the normalized difference Fourier transform magnitude frequency spectra reveal features which unambiguously distinguish the NO/sub 2/ and DIMP challenge gas responses. The area beneath each response envelope can correspondingly be interpreted as the sensor's sensitivity for a specific challenge gas concentration.<<ETX>>","PeriodicalId":247766,"journal":{"name":"Proceedings of the IEEE 1991 National Aerospace and Electronics Conference NAECON 1991","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A chemically-selective microsensor for environmentally-sensitive pollutants realized with an interdigitated gate electrode field-effect transistor (IGEFET)\",\"authors\":\"E. Kolesar, J. M. Wiseman\",\"doi\":\"10.1109/NAECON.1991.165723\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An IGEFET has been coupled with a chemically active, electron-beam evaporated copper phthalocyanine (CuPc) thin film to realize a gas-sensitive microsensor. The sensor can selectively detect parts-per-billion concentration levels of nitrogen dioxide (NO/sub 2/) and diisopropyl methylphosphonate (DIMP). The sensor is excited with a voltage pulse, and the time- and frequency-domain responses are measured. The envelopes associated with the normalized difference Fourier transform magnitude frequency spectra reveal features which unambiguously distinguish the NO/sub 2/ and DIMP challenge gas responses. The area beneath each response envelope can correspondingly be interpreted as the sensor's sensitivity for a specific challenge gas concentration.<<ETX>>\",\"PeriodicalId\":247766,\"journal\":{\"name\":\"Proceedings of the IEEE 1991 National Aerospace and Electronics Conference NAECON 1991\",\"volume\":\"38 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-05-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the IEEE 1991 National Aerospace and Electronics Conference NAECON 1991\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NAECON.1991.165723\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the IEEE 1991 National Aerospace and Electronics Conference NAECON 1991","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NAECON.1991.165723","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A chemically-selective microsensor for environmentally-sensitive pollutants realized with an interdigitated gate electrode field-effect transistor (IGEFET)
An IGEFET has been coupled with a chemically active, electron-beam evaporated copper phthalocyanine (CuPc) thin film to realize a gas-sensitive microsensor. The sensor can selectively detect parts-per-billion concentration levels of nitrogen dioxide (NO/sub 2/) and diisopropyl methylphosphonate (DIMP). The sensor is excited with a voltage pulse, and the time- and frequency-domain responses are measured. The envelopes associated with the normalized difference Fourier transform magnitude frequency spectra reveal features which unambiguously distinguish the NO/sub 2/ and DIMP challenge gas responses. The area beneath each response envelope can correspondingly be interpreted as the sensor's sensitivity for a specific challenge gas concentration.<>
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