X. Tu, Junfeng Song, Xianshu Luo, T. Liow, Mingbin Yu, G. Lo
{"title":"高性能Si3N4波导器件平台","authors":"X. Tu, Junfeng Song, Xianshu Luo, T. Liow, Mingbin Yu, G. Lo","doi":"10.1109/PGC.2012.6457972","DOIUrl":null,"url":null,"abstract":"Si<sub>3</sub>N<sub>4</sub> strip and slot waveguide passive devices platform are demonstrated based on standard CMOS process including athermal MZI filter, multi-channel ring filter, two-ring EIT and AWG. The loss of Si<sub>3</sub>N<sub>4</sub> strip waveguide is 0.6dB/cm for TE mode and 0.66dB/cm for TM mode. A 20-channel micro-ring filter with 25GHz channel spacing is realized with 15dB cross-talk on this Si<sub>3</sub>N<sub>4</sub> platform. Thermal tuning EIT is demonstrated with two-ring filter structure with heater on one of the ring resonator. A 16-channel AWG is realized with a 100GHz channel spacing and 15 dB extinction ratio.","PeriodicalId":158783,"journal":{"name":"2012 Photonics Global Conference (PGC)","volume":"103 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High performance Si3N4 waveguide devices platform\",\"authors\":\"X. Tu, Junfeng Song, Xianshu Luo, T. Liow, Mingbin Yu, G. Lo\",\"doi\":\"10.1109/PGC.2012.6457972\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Si<sub>3</sub>N<sub>4</sub> strip and slot waveguide passive devices platform are demonstrated based on standard CMOS process including athermal MZI filter, multi-channel ring filter, two-ring EIT and AWG. The loss of Si<sub>3</sub>N<sub>4</sub> strip waveguide is 0.6dB/cm for TE mode and 0.66dB/cm for TM mode. A 20-channel micro-ring filter with 25GHz channel spacing is realized with 15dB cross-talk on this Si<sub>3</sub>N<sub>4</sub> platform. Thermal tuning EIT is demonstrated with two-ring filter structure with heater on one of the ring resonator. A 16-channel AWG is realized with a 100GHz channel spacing and 15 dB extinction ratio.\",\"PeriodicalId\":158783,\"journal\":{\"name\":\"2012 Photonics Global Conference (PGC)\",\"volume\":\"103 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Photonics Global Conference (PGC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PGC.2012.6457972\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Photonics Global Conference (PGC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PGC.2012.6457972","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Si3N4 strip and slot waveguide passive devices platform are demonstrated based on standard CMOS process including athermal MZI filter, multi-channel ring filter, two-ring EIT and AWG. The loss of Si3N4 strip waveguide is 0.6dB/cm for TE mode and 0.66dB/cm for TM mode. A 20-channel micro-ring filter with 25GHz channel spacing is realized with 15dB cross-talk on this Si3N4 platform. Thermal tuning EIT is demonstrated with two-ring filter structure with heater on one of the ring resonator. A 16-channel AWG is realized with a 100GHz channel spacing and 15 dB extinction ratio.
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