{"title":"从不同pn结的EOFM模拟和测量中获得新的激光电压信号","authors":"I. Vogt, R. Leihkauf, T. Nakamura, C. Boit","doi":"10.1109/IPFA.2018.8452174","DOIUrl":null,"url":null,"abstract":"We present various results of electro-optical frequency mapping (EOFM) simulations and experiments on different pn-junctions. The results give detailed insight into EOFM signal causes (also parasitic) present in modern ICs, Over 350 EOFM simulations draw a precise quantitative picture of EOFM signal dependence on temperature, doping levels, voltage and laser bandwidth. Additional analysis of the reflected laser-light allows for an estimation and improvement of EOFM signal quality dependent on substrate thickness and interference pattern.","PeriodicalId":382811,"journal":{"name":"2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"New Laser Voltage Signal Insights from EOFM Simulations and Measurements on different pn-junctions\",\"authors\":\"I. Vogt, R. Leihkauf, T. Nakamura, C. Boit\",\"doi\":\"10.1109/IPFA.2018.8452174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present various results of electro-optical frequency mapping (EOFM) simulations and experiments on different pn-junctions. The results give detailed insight into EOFM signal causes (also parasitic) present in modern ICs, Over 350 EOFM simulations draw a precise quantitative picture of EOFM signal dependence on temperature, doping levels, voltage and laser bandwidth. Additional analysis of the reflected laser-light allows for an estimation and improvement of EOFM signal quality dependent on substrate thickness and interference pattern.\",\"PeriodicalId\":382811,\"journal\":{\"name\":\"2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA.2018.8452174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2018.8452174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
New Laser Voltage Signal Insights from EOFM Simulations and Measurements on different pn-junctions
We present various results of electro-optical frequency mapping (EOFM) simulations and experiments on different pn-junctions. The results give detailed insight into EOFM signal causes (also parasitic) present in modern ICs, Over 350 EOFM simulations draw a precise quantitative picture of EOFM signal dependence on temperature, doping levels, voltage and laser bandwidth. Additional analysis of the reflected laser-light allows for an estimation and improvement of EOFM signal quality dependent on substrate thickness and interference pattern.