E. Marigó, J. Munoz-Gamarra, J. Giner, J.L. Lopez, F. Torres, A. Uranga, N. Barniol, J. Verd
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In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.
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