基于潮解盐扩散PI膜的高性能湿度传感器

Ching-Hsiu Chen, Chia-Yen Lee, Shu-Ming Kuo, Che-Hsin Lin
{"title":"基于潮解盐扩散PI膜的高性能湿度传感器","authors":"Ching-Hsiu Chen, Chia-Yen Lee, Shu-Ming Kuo, Che-Hsin Lin","doi":"10.1109/ICSENS.2007.355782","DOIUrl":null,"url":null,"abstract":"This research presents a novel method to improve the sensing performance of capacitive-type humidity sensors by diffusing a deliquescent salt of magnesium chloride (MgCl2) into the thin PI sensing layer. PI sensing film is firstly photo patterned and then immersed into an inorganic salt solution of MgCl2 for salt diffusion process. Since MgCl2 salt deliquesces at the humidity higher than 33%RH, the water absorbability and the humidity response of the proposed humidity sensors are significantly enhanced due to the existence of trace deliquescent salts in the PI sensing film. The measured sensitivity of the proposed humidity sensor is 15 pF/%RH which is up to 750-fold larger than the pure PI-based humidity sensor for the case of 10-mum thick sensing film. In addition, the measured sensitivity is 81 pF/%RH for the case of 40-mum thick sensing layer which is up to 810-fold greater than the pure PI-based humidity sensor. The method proposed in this study is feasible of fabricating MEMS-based high-performance humidity sensors in a simple, reliable and low-cost way.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"High performance Humidity Sensor Based on Deliquescent Salt Diffused PI Film\",\"authors\":\"Ching-Hsiu Chen, Chia-Yen Lee, Shu-Ming Kuo, Che-Hsin Lin\",\"doi\":\"10.1109/ICSENS.2007.355782\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This research presents a novel method to improve the sensing performance of capacitive-type humidity sensors by diffusing a deliquescent salt of magnesium chloride (MgCl2) into the thin PI sensing layer. PI sensing film is firstly photo patterned and then immersed into an inorganic salt solution of MgCl2 for salt diffusion process. Since MgCl2 salt deliquesces at the humidity higher than 33%RH, the water absorbability and the humidity response of the proposed humidity sensors are significantly enhanced due to the existence of trace deliquescent salts in the PI sensing film. The measured sensitivity of the proposed humidity sensor is 15 pF/%RH which is up to 750-fold larger than the pure PI-based humidity sensor for the case of 10-mum thick sensing film. In addition, the measured sensitivity is 81 pF/%RH for the case of 40-mum thick sensing layer which is up to 810-fold greater than the pure PI-based humidity sensor. The method proposed in this study is feasible of fabricating MEMS-based high-performance humidity sensors in a simple, reliable and low-cost way.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355782\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355782","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本研究提出了一种新的方法,通过将潮解盐氯化镁(MgCl2)扩散到薄的PI传感层中来提高电容式湿度传感器的传感性能。首先对PI传感膜进行光图案化处理,然后将其浸入无机盐溶液MgCl2中进行盐扩散。当湿度高于33%RH时,MgCl2盐会发生潮解,由于PI传感膜中存在微量潮解盐,使得该湿度传感器的吸水率和湿度响应显著增强。所提出的湿度传感器的测量灵敏度为15 pF/%RH,在10 μ m厚传感膜的情况下,该灵敏度比纯pi湿度传感器高750倍。此外,在40 μ m厚传感层的情况下,测量灵敏度为81 pF/%RH,比纯pi湿度传感器高810倍。该方法是制造基于mems的高性能湿度传感器的一种简单、可靠、低成本的可行方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
High performance Humidity Sensor Based on Deliquescent Salt Diffused PI Film
This research presents a novel method to improve the sensing performance of capacitive-type humidity sensors by diffusing a deliquescent salt of magnesium chloride (MgCl2) into the thin PI sensing layer. PI sensing film is firstly photo patterned and then immersed into an inorganic salt solution of MgCl2 for salt diffusion process. Since MgCl2 salt deliquesces at the humidity higher than 33%RH, the water absorbability and the humidity response of the proposed humidity sensors are significantly enhanced due to the existence of trace deliquescent salts in the PI sensing film. The measured sensitivity of the proposed humidity sensor is 15 pF/%RH which is up to 750-fold larger than the pure PI-based humidity sensor for the case of 10-mum thick sensing film. In addition, the measured sensitivity is 81 pF/%RH for the case of 40-mum thick sensing layer which is up to 810-fold greater than the pure PI-based humidity sensor. The method proposed in this study is feasible of fabricating MEMS-based high-performance humidity sensors in a simple, reliable and low-cost way.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Smart microplates: integrated photodiodes for detecting bead-based chemiluminescent reactions Novel Biomolecular Finger Printing with an Active Dual-Band Antenna Biosensor Flexible Multimodal Tactile Sensing System for Object Identification Transferrin Electronic Detector for Iron Disease Diagnostics Staggered Sampling for Energy Efficient Data Collection
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1