比较STEREO-LID(时空分辨光学激光诱导损伤)研究IBS、ALD和电子束镀膜介质薄膜的临界缺陷分布

Yejia Xu, A. Khabbazi, T. Day, A. Brown, L. Emmert, J. Talghader, E. Field, D. Kletecka, J. Bellum, D. Patel, C. Menoni, W. Rudolph
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引用次数: 0

摘要

高质量涂层在纳秒脉冲照射下的激光损伤行为是由统计分布缺陷控制的,这些缺陷的物理性质和缺陷机制在很大程度上仍然是未知的。缺陷密度通常通过对传统损伤试验(TDT)方法测量的损伤概率的影响依赖性建模来检索,该方法基于“损伤”或“无损伤”观察结果。STEREO-LID(时空分辨光学激光诱导损伤)通过识别时间和空间上的损伤起始,允许在一次测试中确定损伤影响(和强度)。讨论了该测试方法相对于TDT的优点。特别是,通过比较离子辅助电子束蒸发、离子束溅射和原子层沉积制备的HfO2薄膜的结果,证明了其检索详细缺陷分布函数的能力。
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Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films
The laser damage behavior of high quality coatings under nanosecond pulse illumination is controlled by statistically distributed defects, whose physical nature and defect mechanisms are still largely unknown. Defect densities are often retrieved by modeling the fluence dependence of the damage probability measured by traditional damage test (TDT) methods, based on ‘damage’ or ‘no damage’ observations. STEREO-LID (Spatio-TEmporally REsolved Optical LaserInduced Damage) allows the determination of the damage fluence (and intensity) in a single test by identifying the initiation of damage both temporally and spatially. The advantages of this test method over the TDT are discussed. In particular, its ability to retrieve detailed defect distribution functions is demonstrated by comparison of results from HfO2 films prepared by ion-assisted electron beam evaporation, ion-beam sputtering, and atomic layer deposition.
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