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引用次数: 1

摘要

通过数值模拟分析了超晶格结构热电柱的热应力分布。本文重点分析了用于冷却目的的Bi/sub - 2/Te/sub - 3化合物。用于分析的尺寸可通过金属有机化学气相沉积(MOCVD)技术实现,该技术可以经济地制造高质量的热电器件。采用不同的力学约束条件进行仿真。计算了块状材料热电器件内部的应力。由于超晶格结构组装在机械上与其他薄膜设计相似,因此这些结果可以应用于由不同薄膜技术制成的TE器件。
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Robust thin film thermoelectric devices
The distribution of thermal stresses in thermoelectric columns with superlattice structure was analyzed by numerical simulation. This analysis focused on Bi/sub 2/Te/sub 3/ compounds used for cooling purpose. The dimensions used for analysis are achievable by using metal organic chemical vapor deposition (MOCVD), technology which can economically fabricate high quality thermoelectric devices. Various mechanical constraints were used for simulation. The calculated stresses within thermoelectric (TE) devices made of bulk material were also evaluated. Because the superlattice structure assembly is mechanically similar to other thin film designs, these results can be applied to TE devices made by different thin film techniques.
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