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引用次数: 0

摘要

在表面声波(SAW)器件中,对更快表面波的应用越来越感兴趣。更快的SAW意味着在制造微米宽度和纳米分辨率的数字间换能器(idt)金属条的相同技术难度下,更高的频率操作。最快的声波是体波,它不能在衬底表面传播,也不能在窄频带器件所需的SAW滤波器的较长传播距离上与idt产生强相互作用;体波的表面信号由于波的传播(和衍射)进入身体深处而迅速消失。然而,有一种补救方法:表面光栅,如周期性凹槽或周期性金属条(即器件中应用的idt的这些),可以帮助捕获表面的体波,使其成为复杂的表面波导模式。本文采用早期发展的谱理论方法对这一现象进行了分析,并与后来提出的模态耦合方法进行了对比。这里只讨论力学领域。
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Grating-Induced Waveguiding of Surface-Skimming Bulk Waves
There is ever growing interest in faster surface waves for applications in surface acoustic wave (SAW) devices. Faster SAW means higher frequency operation for the same technological difficulty of making metal strips of interdigital transducers (IDTs) of micrometer width and nanometer resolution. The fastest acoustic waves are the bulk waves which cannot propagate at the substrate surface nor yield strong interaction with IDTs over longer propagation distances required in the SAW filters for narrow-band devices; the surface signal of bulk waves quickly vanish due to the wave propagation (and diffraction) into depth of the body. There is however, a remedy for it: the surface grating like periodic grooves or periodic metal strips (being these of the applied IDTs in the device), can help to trap the bulk wave at the surface making it a complex surface wave-guided mode. This phenomena is analyzed in this paper using the earlier developed spectral theory method in contrast to the couple-of-modes method presented afterwards. Here, only mechanical fields are discussed.
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