裸衬底光散射特性的研究

Pang Yongqiang, Wu Zhensen
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引用次数: 0

摘要

光散射为裸片和薄膜的表征提供了有力的工具。角分辨光散射被用来量化光学元件的表面粗糙度。但是,不透明基片和透明基片的光散射特性不同,因为角度分辨光散射受到透明基片两个界面贡献的影响,不能应用于透明基片。本文分别描述了不透明基片和透明基片的光散射特性,并考虑透明基片两种界面的影响,对透明基片的光散射特性进行了详细分析。
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Study of Light-scattering properties of bare substrates
Light scattering provides a powerful tool for bare substrate and thin films characterization. Angle-resolved light scattering has been used to quantify the surface roughness of optical components. However, light scattering properties are different between opaque substrate and transparent substrate because angle-resolved light scattering is affected by the contribution of both interfaces of the transparent substrate, it cannot be applied to transparent substrates. The light scattering properties of opaque and transparent substrate were described respectively in this paper and light scattering properties of transparent substrate were analyzed in detail considering of the effects of both interfaces of transparent substrate.
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