机器学习机器人抛光细胞

M. Schneckenburger, Luis Garcia, R. Boerret
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引用次数: 6

摘要

光学元件如透镜或反射镜的质量可以用形状误差和表面粗糙度来描述。随着光学尺寸的增大,抛光过程的稳定性变得越来越重要。浆料的化学稳定性或刀具磨损等参数是确定性计算机控制抛光(CCP)过程的关键因素。高精密CCP工艺,如磁流变抛光(MRF)或ZEEKO阀盖抛光工艺,依赖于相关工艺参数的稳定性来预测所需的材料去除。这项工作的目的是通过使用附着在抛光头和抛光过程上的传感器来监测许多与工艺相关的参数。例如安装在抛光垫附近的rpm和扭矩传感器,用于轴承振荡的振动传感器,以及用于测量抛光压力的倾斜传感器和力传感器。通过机器学习系统,对刀具磨损和相关表面质量进行预测。目标是检测抛光过程中的关键影响因素,并建立一种刀具轨迹规划和刀具更换间隔的预测性维护系统。
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Machine learning robot polishing cell
The quality of optical components such as lenses or mirrors can be described by shape errors and surface roughness. With increasing optic sizes, the stability of the polishing process becomes more and more important. Parameters such as chemical stability of the slurry or tool wear are key elements for a deterministic computer controlled polishing (CCP) process. High sophisticated CCP processes such as magnetorheological finishing (MRF) or the ZEEKO bonnet polishing process rely on the stability of the relevant process parameters for the prediction of the desired material removal. Aim of this work is to monitor many process-relevant parameters by using sensors attached to the polishing head and to the polishing process. Examples are a rpm and a torque sensor mounted close to the polishing pad, a vibration sensor for the oscillation of the bearings, as well as a tilt sensor and a force sensor for measuring the polishing pressure. By means of a machine learning system, predictions of tool wear and the related surface quality shall be made. Goal is the detection of the critical influence factors during the polishing process and to have a kind of predictive maintenance system for tool path planning and for tool change intervals.
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