e波段氧化铝基板集成波导元件

S. Moscato, M. Oldoni, Steven Caicedo Mejillones
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引用次数: 1

摘要

本文提出了一套采用薄膜技术实现的基板集成波导元件,适用于e波段应用。非标准氧化铝作为介电材料的选择导致了优异的性能,并增加了这种设备的工作频率,通常受到制造公差的限制。陶瓷基板的固有脆弱性通过特别设计规则得到缓解,该规则限制了过孔密度,而较高的介电常数允许小的模具尺寸,在刚度和处理稳稳性方面具有明显的优势。设计、制造和测试了三个组件:一个直互连、一个匹配负载和一个三极直列带通滤波器。所有设备在70-80 GHz频谱部分显示出有趣的性能。
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Substrate Integrated Waveguide Components on Alumina for E-band Applications
This manuscript presents a set of Substrate Integrated Waveguide components realized through thin-film technology and suitable for E-band applications. The non-standard choice of alumina as dielectric material leads to superior performance and increases the operational frequency of such devices, usually limited by fabrication tolerances. The intrinsic fragility of the ceramic substrate is mitigated through ad-hoc design rules which limit the via-hole density while the higher dielectric constant allows a small die size, with clear advantages in stiffness and handling robustness. Three components have been designed, manufactured and tested: a straight interconnection, a matched load, and a three-pole in-line band pass filter. All the devices show interesting performance across the 70–80 GHz spectrum portion.
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