{"title":"钢与陶瓷基板上LIF涂层纳米结构的比较","authors":"H. Kangarloo, S. Rafizadeh, Mojtaba Farhangmehr","doi":"10.1109/ICMET.2010.5598461","DOIUrl":null,"url":null,"abstract":"In this paper, the nano layers of LiF, were produced by using PVD method on Steel and Ceramic substrates and in vacuum conditions and vertical deposition angle. The produced nano-structures are studied by using AFM and XRD methods. The results of AFM analyses showed different morphology for both layers. The coated layer on Steel have smoother surface, than the Ceramic substrate. The noticeable point is the form of produced nano-grains that is global for steel substrate and needle like for ceramic substrate. XRD patterns didn't show any LiF peaks in98 nm thickness and 220C deposition temperature.","PeriodicalId":415118,"journal":{"name":"2010 International Conference on Mechanical and Electrical Technology","volume":"65 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparison of nano-structures of LIF coated on Steel and Ceramic substrates\",\"authors\":\"H. Kangarloo, S. Rafizadeh, Mojtaba Farhangmehr\",\"doi\":\"10.1109/ICMET.2010.5598461\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, the nano layers of LiF, were produced by using PVD method on Steel and Ceramic substrates and in vacuum conditions and vertical deposition angle. The produced nano-structures are studied by using AFM and XRD methods. The results of AFM analyses showed different morphology for both layers. The coated layer on Steel have smoother surface, than the Ceramic substrate. The noticeable point is the form of produced nano-grains that is global for steel substrate and needle like for ceramic substrate. XRD patterns didn't show any LiF peaks in98 nm thickness and 220C deposition temperature.\",\"PeriodicalId\":415118,\"journal\":{\"name\":\"2010 International Conference on Mechanical and Electrical Technology\",\"volume\":\"65 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-10-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Mechanical and Electrical Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMET.2010.5598461\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Mechanical and Electrical Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMET.2010.5598461","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Comparison of nano-structures of LIF coated on Steel and Ceramic substrates
In this paper, the nano layers of LiF, were produced by using PVD method on Steel and Ceramic substrates and in vacuum conditions and vertical deposition angle. The produced nano-structures are studied by using AFM and XRD methods. The results of AFM analyses showed different morphology for both layers. The coated layer on Steel have smoother surface, than the Ceramic substrate. The noticeable point is the form of produced nano-grains that is global for steel substrate and needle like for ceramic substrate. XRD patterns didn't show any LiF peaks in98 nm thickness and 220C deposition temperature.
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