Deterministically fabricated quantum dot – waveguide systems for on-chip quantum optics

The deterministic integration of quantum emitters into on-chip photonic elements is crucial for the implementation of scalable on-chip quantum circuits. Here, we report on the deterministic integration of single quantum dots (QD) into tapered multimode interference beam splitters using in-situ electron beam lithography (EBL). We demonstrate the functionality of the deterministic QD-waveguide structures by µPL spectroscopy and by studying the photon cross-correlation between the two MMI output ports. The latter confirms single-photon emission and on-chip splitting associated with g(2)(0) << 0.5. Moreover, the deterministic integration of QDs enables the demonstration and controlled study of chiral light-matter effects and directional emission in QD-WGs, and the realization of low-loss heterogenous QD-WG systems with excellent quantum optical properties.