{"title":"拉入式操作模式加速度计","authors":"L. Pakula, P. French","doi":"10.1109/ICSENS.2007.355824","DOIUrl":null,"url":null,"abstract":"In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"A Pull-in Operation Mode Accelerometer\",\"authors\":\"L. Pakula, P. French\",\"doi\":\"10.1109/ICSENS.2007.355824\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355824\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355824","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
