混合晶圆级互连发明新技术

R. Schmidt
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引用次数: 0

摘要

描述了一种单片多层薄膜技术,其特点是自由布线和大量借鉴VLSI设计/制造技术的蜂窝设计方法。本文将其称为混合晶圆规模互连(HWSI),它在许多方面保留了单片晶圆规模集成(WSI)的优点,同时提供更高的良率和卓越的性能,通常与优化的子组件相关。值得注意的是,目前正在开发的许多“单片”WSI系统使用相同的,甚至更多的离散子组件,而不是拟议的HWSI技术。
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Hybrid wafer scale interconnection inventing a new technology
Describes a monolithic multilayer thin film technology featuring discretionary wiring and a cellular design methodology which borrows heavily from VLSI design/fabrication technology. Referred to herein as Hybrid Wafer Scale Interconnect (HWSI), it preserves in many ways the advantages of monolithic Wafer Scale Integration (WSI), while simultaneously offering higher yield and superior performance typically associated with optimized subassemblies. It is noteworthy that many 'monolithic' WSI systems currently under development utilize the same, or even more discrete subassemblies, than the proposed HWSI technology.<>
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