{"title":"可控微机械电容式超声换能器的三维仿真","authors":"M. Kaltenbacher, H. Landes, K. Niederer, R. Lerch","doi":"10.1109/ULTSYM.1999.849202","DOIUrl":null,"url":null,"abstract":"A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced.","PeriodicalId":339424,"journal":{"name":"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"3D simulation of controlled micromachined capacitive ultrasound transducers\",\"authors\":\"M. Kaltenbacher, H. Landes, K. Niederer, R. Lerch\",\"doi\":\"10.1109/ULTSYM.1999.849202\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced.\",\"PeriodicalId\":339424,\"journal\":{\"name\":\"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)\",\"volume\":\"86 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-10-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1999.849202\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1999.849202","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
3D simulation of controlled micromachined capacitive ultrasound transducers
A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced.
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