超重型6.0密尔铜丝球粘接

T. Chai, J. Tan, M. Sivakumar, J. Premkumar, James Song, Y. Wong
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引用次数: 1

摘要

几十年来,业界一直在寻求用铜(Cu)代替金(Au)在线键合互连中的线材。随着铜丝键合工艺的成熟,提出了用铜球键合代替铝楔键合的设想。这种替代可以潜在地获得更低的机器拥有成本和更好地利用硅资产的好处。它还具有更好的导电性,更慢的金属间生长和可能更便宜的材料价格。然而,相关的挑战,如硬度和氧化可能是压倒性的,需要仔细评估。本研究的目的是提供6.0密尔铜丝键合工艺的见解。6.0 mm铜丝是铝-铜丝替代方案的关键候选材料。实验研究了铜线、芯片和导线的键合作用。
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Super heavy 6.0 mils Cu wire ball bonding
The quest to replace wire material from gold (Au) to Copper (Cu) in wire bonding interconnect has been in the industry since few decades. As the Cu wire bonding manufacturing process matures, the idea of substituting Al wedge bond with Cu ball bond is mooted. Such substitution could potentially reap benefits of lower machine cost of ownership and better utilization of silicon real estate. It also comes with better conductivity, slower intermetallic growth and possibly cheaper material price. However, the associated challenges such as hardness and oxidation could be overwhelming and requires a careful assessment. The objective of this study is to provide insight of the 6.0 mils Cu wire bonding process. 6.0 mils Cu wire is the key candidate in this Al - Cu wire substitution idea. Bonding interaction of Cu wire, chip & lead are studied experimentally.
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