Rong Ma, Meiju Zhang, Zhongkai Zhang, Manguo Huang, Xiaobo Liang, Jiangjiang Liu, Zhaojun Liu, B. Tian
{"title":"用于原位测量的双节点薄膜热电偶","authors":"Rong Ma, Meiju Zhang, Zhongkai Zhang, Manguo Huang, Xiaobo Liang, Jiangjiang Liu, Zhaojun Liu, B. Tian","doi":"10.1109/ICARCE55724.2022.10046476","DOIUrl":null,"url":null,"abstract":"The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5% rhenium and tungsten with 26% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02%, providing application value for high-temperature in-situ sensing.","PeriodicalId":416305,"journal":{"name":"2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)","volume":"266 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Double Node Thin-Film Thermocouples for In-Situ Measurement\",\"authors\":\"Rong Ma, Meiju Zhang, Zhongkai Zhang, Manguo Huang, Xiaobo Liang, Jiangjiang Liu, Zhaojun Liu, B. Tian\",\"doi\":\"10.1109/ICARCE55724.2022.10046476\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5% rhenium and tungsten with 26% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02%, providing application value for high-temperature in-situ sensing.\",\"PeriodicalId\":416305,\"journal\":{\"name\":\"2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)\",\"volume\":\"266 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-12-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICARCE55724.2022.10046476\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICARCE55724.2022.10046476","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Double Node Thin-Film Thermocouples for In-Situ Measurement
The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5% rhenium and tungsten with 26% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02%, providing application value for high-temperature in-situ sensing.
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