激光去除PVD涂层

Laser Damage Pub Date : 2022-12-02 DOI:10.1117/12.2642743
Martin Mydlář, J. Vanda, Radek Poboril, J. Brajer
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引用次数: 0

摘要

使用激光烧蚀去除应力工业工具的多重化合物保护薄PVD膜可以增强或取代目前使用的方法。开发激光去除工艺可以缩短加工时间和成本。在第一步中,测量了薄CrAlSiN涂层和WC-Co材料的激光损伤阈值。采用纳秒和皮秒激光脉冲进行比较。此外,还测量了烧蚀材料体积和烧蚀深度对能量通量和脉冲数的依赖关系。最后,对烧蚀过程中产生的激光等离子体进行了光谱分析。
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Laser removal of PVD coatings
The removal of multi-compound protective thin PVD films for stressed industrial tools using laser ablation could enhance or replace currently used procedures. Developing a laser removal process can shorten the processing time and costs. In the first step, the laser-induced damage threshold of the thin CrAlSiN coating and the WC-Co material was measured. Nanosecond and picosecond laser pulses were used for comparison. Furthermore, the dependence of the ablated material volume and ablation depth on the fluence and the number of pulses was measured. Finally, spectral analysis of the laser plasma generated during ablation was performed.
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