用于湿度传感的高灵敏度外部法布里-珀特干涉仪

2015 9th International Conference on Sensing Technology (ICST) Pub Date : 2015-12-01 DOI:10.1109/ICSENST.2015.7438380

J. Ascorbe, C. Sanz, J. Corres, F. Arregui, I. Matías, S. Mukhopadhyay

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引用次数: 5

摘要

本文介绍了一种高灵敏度光纤湿度传感器。为此目的选择的配置是一个法布里-普氏干涉仪。该装置是用溅射法制造的。采用半导体材料构建产生干涉测量的纳米腔。然后将该装置引入气候室，以改变相对湿度。在相对湿度从20%到90%的范围内，获得了88 nm的变化，这意味着灵敏度为1.27 nm/%RH。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

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2015 9th International Conference on Sensing Technology (ICST)

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