rta -simulation With 2-d Process Simulator promises

{"title":"rta -simulation With 2-d Process Simulator promises","authors":"G. Hobler, S. Halania, K. Wimmer, S. Selberherr, H. Potzl","doi":"10.1109/NUPAD.1990.748253","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":348970,"journal":{"name":"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits","volume":"35 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Rta-simulations With the 2-d Process Simulator Promis\",\"authors\":\"G. Hobler, S. Halania, K. Wimmer, S. Selberherr, H. Potzl\",\"doi\":\"10.1109/NUPAD.1990.748253\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":348970,\"journal\":{\"name\":\"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits\",\"volume\":\"35 4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-06-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NUPAD.1990.748253\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NUPAD.1990.748253","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}