平行耦合方形谐振器微机械滤波器阵列

2006 IEEE International Frequency Control Symposium and Exposition Pub Date : 2006-06-01 DOI:10.1109/FREQ.2006.275434

J.R. Clark, Minfan Pai, B. Wissman, G. He, W. Hsu

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引用次数: 12

摘要

大型、平行耦合的微机械方形谐振器阵列已经被证明，在30个强耦合器件阵列中，大大降低了聚合谐振器的等效阻抗，而保持了接近10,000的质量因子。此外，为了形成10.7MHz中频滤波器，多个强耦合阵列通过机械连接进行弱耦合，如外差调频无线电系统中所需要的那样，大大降低了匹配阻抗要求

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Parallel-Coupled Square-Resonator Micromechanical Filter Arrays

Large, parallel-coupled arrays of micromechanical square resonators have been demonstrated, greatly reducing the equivalent impedance of the aggregate resonator by up to a factor of 30 in an array of 30 strongly-coupled devices while retaining quality factors approaching 10,000. In addition, multiple strong-coupled arrays have been weakly coupled via mechanical linkage in order to form a 10.7MHz IF filter, such as would be required in a heterodyning FM radio system, with greatly reduced matching impedance requirements

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2006 IEEE International Frequency Control Symposium and Exposition

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