提高器件性能的In0.53Ga0.47As/InP沟栅功率MOSFET的设计与仿真

S. Mohanty, Sikha Mishra
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引用次数: 0

摘要

本文提出了一种基于In0.53Ga0.47As/InP的III-V组沟道材料异质介电沟栅(HD-TG)功率MOSFET (HD-TG-MOSFET),用于低压应用。该模型在n- In0.53Ga0.47As漂移区和n+InP漏极区界面处采用带间隧穿现象。该器件在In0.53Ga0.47As源体两侧包含一条沟槽和n-In0.53Ga0.47As漂移区,使得通道从源到漏平行导通。因此,减少了通道内的表面场效应,从而提高了器件的其他性能参数。由于在沟道区域使用了高迁移率材料In0.53Ga0.47As, HD-TG-MOSFET具有低Ron和改进的跨导性。从二维TCAD器件仿真中可以看出,与传统的沟槽栅(C-TG)功率MOSFET相比,所提出的器件在导通电阻、峰值跨导和漏极电流方面表现出更好的器件性能,适用于高速和低功耗应用。
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Design and Simulation of In0.53Ga0.47As/InP Trench-Gate Power MOSFET to Improve the Device Performance
In this paper, a group III-V channel material In0.53Ga0.47As/InP based hetero dielectric trench-gate (HD-TG) power MOSFET (HD-TG-MOSFET) is presented for low voltage application. This model is employing band-to-band tunneling phenomena at the interface of n- In0.53Ga0.47As drift region and n+InP drain region. The proposed device contains a trench within both sides of the source of In0.53Ga0.47As body and n-In0.53Ga0.47As drift region which makes the parallel conduction of the channel from the source to drain. So, there is a reduction of surface field effect in the channel which improves the other device performance parameter. HD-TG-MOSFET offers low Ron and improved transconductance due to the use of high mobility material In0.53Ga0.47As in the channel region. From the 2D TCAD device simulation, it is demonstrated that the proposed device shows improved device performance in terms of On-resistance, peak trans-conductance, and drain current which is suitable for high speed and low power applications as compared to the conventional trench gate (C-TG) power MOSFET.
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