强脉冲光离子束在材料科学中的应用

K. Yatsui, Wenhui Jiang, N. Harada, T. Sonegawa
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引用次数: 0

摘要

强脉冲光离子束(LIE)与靶体相互作用,由于其作用距离短,产生高密度的烧蚀等离子体(离子束烧蚀等离子体:IBAP)。自1988年首次用离子束蒸发法(IBE)制备ZnS薄膜以来,我们制备了各种类型的薄膜。除了通过IBE (FS/IBE)的标准正面沉积(衬底位于目标的前面)之外,通过背面沉积(BS/IBE),衬底放置在支架的后面,薄膜质量得到了显着改善。用BS/IBE分析了薄膜的特性。通过快速冷却IBAP,我们合成了纳米级粉末。富勒烯也已成功制备。在此基础上,利用LIE辐照靶研究了箔片的加速度。简要介绍了IBAP在材料科学中的应用。
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Applications of intense pulsed light ion beams to materials science
By an intense pulsed light ion beam (LIE) interaction with target, high density ablation plasma is produced (ion beam ablation plasma: IBAP) due to short range of LIE. Since the first preparation of thin films of ZnS by IBAP in 1988 (ion beam evaporation: IBE), we prepared various kinds of thin films. In addition to standard front side deposition by IBE (FS/IBE), where a substrate is located in front of the target, significant improvement has been achieved of the film quality by back side deposition (BS/IBE), where the substrate is placed just behind the holder. Characteristics of the films by BS/IBE are shown. By rapid cooling of IBAP, we synthesized nanosize powders. Fullerene has also been successfully prepared. Furthermore, foil acceleration has been studied by the irradiation of LIE on a target. Quick overview is given on the applications of IBAP in materials science.
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