任意取向和应变对周围栅极晶体管的影响

I. M. Tienda-Luna, F. Ruiz, A. Godoy, F. Gámiz
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引用次数: 1

摘要

在CMOS晶体管中,可以采用多种技术来增加驱动电流。在本文中,我们研究了不同晶圆取向和应变方法对周围栅极晶体管的影响。具体来说,我们关注的是量子电子密度和迁移率。由于有效质量张量和导带边缘位置的变化,两个量级的显著变化是可以预期的。
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Effect of Arbitrary Orientation and Strain on Surrounding Gate Transistors
A variety of techniques can be employed to increase the drive current in CMOS transistors. In this paper, we study the effects of using different wafer orientations and strain methods in surrounding gate transistors. Specifically, we focus on Quantum Electron Density and mobility. A significant modification of both magnitudes is to be expected, due to the changes caused in the effective mass tensor and in the conduction band edge position.
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