{"title":"溶液法氧化镓锡作为tft中无铟活性层的新选择","authors":"Chuan Liu, Zhaogui Wang","doi":"10.23919/AM-FPD.2018.8437416","DOIUrl":null,"url":null,"abstract":"We report a newly developed solution-processed amorphous oxide semiconductor, gallium-tin-oxide (GTO), for the active layer of thin-film transistors (TFTs). The transparent GTO thin film was fabricated by sol-gel process and patterned by photo-lithography into isolated arrays. The resulting TFTs exhibit a threshold voltage around zero-volgate, an on-off ratio as 106, and the field-effect mobility as 4.1 cm2/Vs. The electrical properties is readily higher than that of ZnO and comparable to solution-processed InGaZnO. Moreover, the un-capsulated TFTs exhibit better stablility in gate-bias stressing then solution-processed IGZO TFTs as measured in ambient conditions. The study may provide a new choice for the active layers for oxide-based TFTs and display technology.","PeriodicalId":221271,"journal":{"name":"2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Solution-processed gallium-tin-oxide as a new choice for indium-free active layers in TFTs\",\"authors\":\"Chuan Liu, Zhaogui Wang\",\"doi\":\"10.23919/AM-FPD.2018.8437416\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report a newly developed solution-processed amorphous oxide semiconductor, gallium-tin-oxide (GTO), for the active layer of thin-film transistors (TFTs). The transparent GTO thin film was fabricated by sol-gel process and patterned by photo-lithography into isolated arrays. The resulting TFTs exhibit a threshold voltage around zero-volgate, an on-off ratio as 106, and the field-effect mobility as 4.1 cm2/Vs. The electrical properties is readily higher than that of ZnO and comparable to solution-processed InGaZnO. Moreover, the un-capsulated TFTs exhibit better stablility in gate-bias stressing then solution-processed IGZO TFTs as measured in ambient conditions. The study may provide a new choice for the active layers for oxide-based TFTs and display technology.\",\"PeriodicalId\":221271,\"journal\":{\"name\":\"2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/AM-FPD.2018.8437416\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/AM-FPD.2018.8437416","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Solution-processed gallium-tin-oxide as a new choice for indium-free active layers in TFTs
We report a newly developed solution-processed amorphous oxide semiconductor, gallium-tin-oxide (GTO), for the active layer of thin-film transistors (TFTs). The transparent GTO thin film was fabricated by sol-gel process and patterned by photo-lithography into isolated arrays. The resulting TFTs exhibit a threshold voltage around zero-volgate, an on-off ratio as 106, and the field-effect mobility as 4.1 cm2/Vs. The electrical properties is readily higher than that of ZnO and comparable to solution-processed InGaZnO. Moreover, the un-capsulated TFTs exhibit better stablility in gate-bias stressing then solution-processed IGZO TFTs as measured in ambient conditions. The study may provide a new choice for the active layers for oxide-based TFTs and display technology.